Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
  • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
  • H01L21/3063—Electrolytic etching
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D99/00—Subject matter not provided for in other groups of this subclass
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S438/00—Semiconductor device manufacturing: process
  • Y10S438/978—Semiconductor device manufacturing: process forming tapered edges on substrate or adjacent layers

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Weting (AREA)
• Thyristors (AREA)
• Electrodes Of Semiconductors (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=10442362

Family Applications (1)

Country Status (10)

Families Citing this family (33)

Family Cites Families (13)

• 1974
  • 1974-10-29 GB GB46726/74A patent/GB1485015A/en not_active Expired
• 1975
  • 1975-10-17 DE DE19752546564 patent/DE2546564A1/de not_active Withdrawn
  • 1975-10-22 US US05/624,726 patent/US4028140A/en not_active Expired - Lifetime
  • 1975-10-22 US US05/624,724 patent/US4007104A/en not_active Expired - Lifetime
  • 1975-10-23 CA CA238,325A patent/CA1057172A/en not_active Expired
  • 1975-10-23 AU AU85944/75A patent/AU500045B2/en not_active Expired
  • 1975-10-25 JP JP12880075A patent/JPS533235B2/ja not_active Expired
  • 1975-10-27 NL NL7512514A patent/NL7512514A/xx not_active Application Discontinuation
  • 1975-10-27 CH CH1390675A patent/CH595697A5/xx not_active IP Right Cessation
  • 1975-10-28 BE BE161335A patent/BE834965A/xx unknown
  • 1975-10-29 FR FR7533030A patent/FR2290033A1/fr active Pending

Also Published As

Similar Documents

Legal Events